JPS51112463U - - Google Patents
Info
- Publication number
- JPS51112463U JPS51112463U JP3057175U JP3057175U JPS51112463U JP S51112463 U JPS51112463 U JP S51112463U JP 3057175 U JP3057175 U JP 3057175U JP 3057175 U JP3057175 U JP 3057175U JP S51112463 U JPS51112463 U JP S51112463U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3057175U JPS51112463U (en]) | 1975-03-06 | 1975-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3057175U JPS51112463U (en]) | 1975-03-06 | 1975-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS51112463U true JPS51112463U (en]) | 1976-09-11 |
Family
ID=28138340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3057175U Pending JPS51112463U (en]) | 1975-03-06 | 1975-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51112463U (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58141536A (ja) * | 1982-02-17 | 1983-08-22 | Sanyo Electric Co Ltd | 半導体ウエハ−の吸着ヘツド |
| JPH02303047A (ja) * | 1989-05-18 | 1990-12-17 | Shioya Seisakusho:Kk | ウエハチヤツク方法及び装置 |
| JP2013237110A (ja) * | 2012-05-11 | 2013-11-28 | Myotoku Ltd | 搬送保持具及び搬送保持装置 |
-
1975
- 1975-03-06 JP JP3057175U patent/JPS51112463U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58141536A (ja) * | 1982-02-17 | 1983-08-22 | Sanyo Electric Co Ltd | 半導体ウエハ−の吸着ヘツド |
| JPH02303047A (ja) * | 1989-05-18 | 1990-12-17 | Shioya Seisakusho:Kk | ウエハチヤツク方法及び装置 |
| JP2013237110A (ja) * | 2012-05-11 | 2013-11-28 | Myotoku Ltd | 搬送保持具及び搬送保持装置 |